| Dimensions (L*W*H) | 770 x 1,400 x 1,480 mm |
| Weight | Approx. 950 kg |
| Positioning accuracy | ±30 um @ 4 sigma (CPK > 1.33) |
| Repeat Position Accuracy | ±15 um @ 4 sigma (CPK > 1.33) |
| Motion driver | Servo motor + Ball screw |
| PCB size (L*W) | (50 x 50) ~ (350 x 520) mm |
| PCB Thickness | 0.8 ~ 6.0 mm |
| Product weight | ≤ 3 kg |
| Dispensing area (L*W) | 350 x 520 mm |
| Board clearance | Top: 50mm; Bottom: 25mm |
| Transportation height | 900 ± 30 mm |